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X-Ray Reflectivity Study of Reactive DC Sputter Deposited Al2O3 Thin Films
X-Ray Reflectivity Reactive DC Sputter Al2O3 Thin Films
2010/12/15
X-ray reflection was performed on Al2O3 thin films obtained by dc magnetron sputtering of aluminium in an argon/oxygen atmosphere. Two kind of films (amorphous and γ-Al2O3) were deposited on polished ...